Contamination Fallout in the Cleanroom: Monitoring Airborne Molecular Contamination (AMC) and Surface Molecular Contamination (SMC) to Minimize Impact

The purpose of this webinar is to provide an overview of AMC and SMC and its impact on manufacturing.  To achieve world class manufacturing, there must be a delicate balance between AMC and SMC control in a cleanroom and adherence to the manufacturing production schedule.  It is preferable to control cleanroom contamination earlier and in a proactive manner than for it to cause a bottleneck constraint in the manufacturing process.  

This webinar reviews the general requirements and classification for a cleanroom to provide cleanliness integrity for product assembly and manufacturing.  We will discuss contamination fallout of Airborne Molecular Contamination (AMC), their sources and challenges to control AMC, and continuous monitoring using online instrumentation and grab sampling techniques.  AMC reduction starts with the deliberate selection of cleanroom build materials, cleanroom consumables, and the product’s build of materials.

Airborne Molecular Contamination (AMC) can result in Surface Molecular Contamination (SMC) that affects the product performance.  The control of SMC in the cleanroom requires an understanding of its mobility and transfer through cross-contamination during the manufacturing process.  Operation in the cleanroom with Clean Manufacturing and BKMs (Best Known Methods) is required to minimize the impact of SMC to the product performance.  

We will discuss BKM for wiper selection and wipe-down procedure of critical surfaces, Case studies of cleanroom metal surface contamination mapping are presented that can reveal contamination hot spots and poor adherence to Clean Manufacturing procedures. 


  1. Introduction to cleanroom
    1. Its role, configuration, classification, and filtration systems
  2. Airborne molecular contamination (AMC)
    1. Sources, compounds, and its impact to semiconductor process
  3. AMC testing
  4. SMC testing, critical wipes, and ICP-MS to optimize cleanroom operation
  5. Summary


Victor Chia

Dr. Victor Chia is an Air Liquide International Expert and the Director at Balazs NanoAnalysis for Surface Contamination Technologies. Victor has served in the semiconductor industry for over 35 years, received his Ph.D. in Analytical Chemistry from the University of California, Santa Barbara, M.Sc. degrees from University of London, Chelsea College and was a Post-Doctoral Fellow at Lawrence Berkeley National Laboratory. He is the current chair of ESTECH AMC-SMC Session, is on the IEST editorial review board, and past chair and co-author of the IEST WG-CC031 recommended practice for organic outgassing in materials. Victor has held positions at KLA and EAG (Evans Analytical Group).

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July 30, 2024
12 - 2 p.m. Central Time

Early-bird discount ends May 21. Use coupon code EB7AMC2024 to save 10% off.

Online registration closes July 29. Registrations will still be taken after this rate if space permits.

Registration Information

Regular Rate
(through 7/29)
Member: $195
Non-member: $275


Register three attendees from your company for the same training course and receive a complimentary fourth registration for another person in your company to attend that course for free! Contact IEST at 847-981-0100 to arrange this option. (Complimentary registration applies to registration of equal or lesser value. Not valid with any other offers or promotions.)

  • Transfers: All registrations are transferable to another person for the same event A $35 transfer fee applies. Transfer of a member registration to a nonmember registration will be charged the difference in fees.
  • Cancellations: Cancellation requests received 60 days or more prior to the start of the event will receive a full refund LESS a $75 administration fee. Cancellation requests received 30-59 days prior to the start of the event will receive a 50% refund. No refunds will be issued for cancellation requests received less than 30 days prior to the start of the event. IEST reserves the right to cancel course(s), in which case registrants will receive a refund of the fee. IEST is not responsible for any refund or remuneration for hotel, transportation, additional registration fees, tours, or other expenses related to attendance beyond the registration fee refund.
  • IEST reserves the right to cancel courses, in which case registrants will receive a full refund of the tuition fee.
  • Program and instructor(s) are subject to change.
  • .2 CEUs per class.
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