ISO 14644-3

ISO 14644-3, Test Methods
(U.S. Title: ANSI/IEST/ISO 14644-3:2005)

ISO 14644, Cleanrooms and associated controlled environments - Part 3: Test Methods, is referenced in many of the ISO/TC 209 Standards.

Scope of ISO 14644-3
This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by the type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, several different methods and apparatus are recommended to accommodate different end-use considerations. Alternative methods not included in this part of ISO 14644 may be used if based on agreement between customer and supplier. Alternative methods do not necessarily provide equivalent measurements. This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms or separative devices.

Background of Document
The first meeting of WG 3 was held in 1994 in Tokyo. Initial questions faced by the working group were: what was to be included in the standard and what was to be the structure of the standard. During brainstorming sessions in the first meeting, measurements and tests related to cleanrooms were classified into three categories:

  • Measurement and test methods inherent to cleanrooms.
  • Measurement and test methods often used in cleanroom but not limited to cleanrooms.
  • Measurement and test methods of a general nature.

As cleanrooms include all phases of the engineering sciences, the measurement and test methods related to cleanrooms were numerous. WG 3 was requested by ISO/TC 209 to use the following policy to decide which items to include in the document:

If there are any previously established standards on the subject, refer to them. Include items according to the requests or needs of other Working Groups.

The most important objectives of this document are to provide an internationally common basis of measurement and evaluation of cleanrooms and, at the same time, not to prevent the introduction of new technologies. The latter is the reason that the part of this Standard related to instrumentation is Informative. The document was submitted as an American National Standard and has been adopted as ANSI/IEST/ISO 14644-3:2005 in the United States.

View list of ISO 14644 Standards

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