ISO 14644-3, Test Methods
(U.S. Title: ANSI/IEST/ISO 14644-3:2005)
ISO 14644, Cleanrooms and associated controlled environments - Part 3: Test Methods, is referenced in many of the ISO/TC 209 Standards.
Scope of ISO 14644-3
part of ISO 14644 specifies test methods for designated classification
of airborne particulate cleanliness and for characterizing the
performance of cleanrooms and clean zones. Performance tests are
specified for two types of cleanrooms and clean zones: those with
unidirectional flow and those with non-unidirectional flow, in three
possible occupancy states: as-built, at-rest and operational. The test
methods recommend test apparatus and test procedures for determining performance parameters. Where the test method is affected by the
type of cleanroom or clean zone, alternative procedures are suggested.
For some of the tests, several different methods and apparatus are
recommended to accommodate different end-use considerations. Alternative
methods not included in this part of ISO 14644 may be used if based on
agreement between customer and supplier. Alternative methods do not
necessarily provide equivalent measurements. This part of ISO 14644 is
not applicable to the measurement of products or of processes in
cleanrooms or separative devices.
Background of Document
first meeting of WG 3 was held in 1994 in Tokyo. Initial questions
faced by the working group were: what was to be included in the standard
and what was to be the structure of the standard. During brainstorming
sessions in the first meeting, measurements and tests related to
cleanrooms were classified into three categories:
- Measurement and test methods inherent to cleanrooms.
- Measurement and test methods often used in cleanroom but not limited to cleanrooms.
- Measurement and test methods of a general nature.
cleanrooms include all phases of the engineering sciences, the
measurement and test methods related to cleanrooms were numerous. WG 3
was requested by ISO/TC 209 to use the following policy to decide which
items to include in the document:
If there are any previously
established standards on the subject, refer to them. Include items
according to the requests or needs of other Working Groups.
most important objectives of this document are to provide an
internationally common basis of measurement and evaluation of cleanrooms
and, at the same time, not to prevent the introduction of new
technologies. The latter is the reason that the part of this Standard
related to instrumentation is Informative. The document was submitted as
an American National Standard and has been adopted as ANSI/IEST/ISO
14644-3:2005 in the United States.
View list of ISO 14644 Standards