ISO 14644-9, Classification of Surface Cleanliness by Particle Concentration
(U.S. Title: ANSI/IEST/ISO 14644-9:2012)
14644-9, Cleanrooms and associated controlled environments - Part 9:
Classification of surface cleanliness by particle concentration, may be ordered directly
through IEST. ISO 14644-9 was published as an International Standard in
2012. The document was submitted as an American National Standard and
has been adopted as ANSI/IEST/ISO 14644-9:2012.
ISO document describes the classification of the particle contamination
levels on solid surfaces in cleanrooms and associated controlled
environments applications. Recommendations on testing and measuring
methods as well as information about surface characteristics are given
in informative annexes.
It applies to all solid surfaces in
cleanrooms and associated controlled environments such as walls,
ceilings, floors, working environment, tools, equipment, and devices.
The surface particle cleanliness (SPC) classification is limited to
particles between 0,05 µm and 500 µm.
The following issues are not considered in this document:
- Requirements on the cleanliness and suitability of surfaces for specific processes
- Procedures for the cleaning of surfaces material characteristics
- Other characteristics of particles such as electrostatic charge, ionic charges, biological state, and others
document covers the classification system of surface particle
contamination with no reference to the interactive bonding forces or
generation processes, which are usually time-dependent (such as
deposition, sedimentation, aging) and process-dependent (such as
transportation or handling). Measurement methods of the classification
should be adapted for surface characteristics (such as porosity,
roughness, electrostatic charge, surface energy, etc.). The surface
cleanliness depends amongst others on material and design
characteristics, on stress loads (complex of loads acting on a surface)
and on the prevailing environmental conditions.
View list of ISO 14644 Standards