This Recommended Practice (RP), IEST-RP-CC016.2, provides a uniform method and basis for defining the rates of deposition of nonvolatile residue (NVR) and other forms of molecular contamination on surfaces in cleanrooms.
First printing, November 2002
(Supersedes previous versions, including IEST-RP-CC016.1)
The Rate of Deposition of Nonvolatile Residue in Cleanrooms was prepared by Working Group 016 of the IEST Contamination Control Division (WG-CC016).
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