IEST-RP-CC007: Testing ULPA Filters

This Recommended Practice (RP), IEST-RP-CC007.3, describes the equipment, aerosol properties, processes, and calculations for determining the efficiency of ultralow penetration air (ULPA) filters, using particle counters. This test procedure covers production testing of filters for particle penetration and pressure drop of ULPA filters. The penetration range of the procedure is 0.001% to 0.0001%, using particle counters. The procedure may be applied to production applications.

This RP provides guidelines for constructing a suitable test duct and sampling system. Also provided are test criteria for quantifying penetration in the range of 0.001% to 0.0001%, using test aerosol particles in the size range of 0.1 to 0.2 μm.

First printing, October 2007 (Supersedes previous versions, including IEST-RP-CC007.2 and IEST-RP-CC007.1)

Testing ULPA Filters was prepared by Working Group 007 of the IEST Contamination Control Division (WG-CC007).