This Recommended Practice (RP), IEST-RP-CC043, will describe the types of surface molecular contamination (SMC) that may affect critical surfaces and processes. Types of SMC include organic and inorganic contaminants that may be adsorbed or reacted onto the surface. Effects are manifested in the physical, electrical, chemical, or optical properties of the surface. The document will also describe sources as well as measurement and control methods.

The first edition of Surface Molecular Contamination is under development by Working Group 043 of the IEST Contamination Control Division (WG-CC043).