ISO/FDIS 14644-9, Classification of
Surface Cleanliness by Particle Concentration
(Final Draft International Standard)
ISO/FDIS 14644-9, Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration, is currently a Final Draft International Standard.
Background
This ISO document describes the classification of the particle contamination levels on solid surfaces in cleanrooms and associated controlled environments applications. Recommendations on testing and measuring methods as well as information about surface characteristics are given in informative annexes.
It applies to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment, and devices. The surface particle cleanliness (SPC) classification is limited to particles between 0,05 µm and 500 µm.
The following issues are not considered in this document:
Requirements on the cleanliness and suitability of surfaces for specific processes
Procedures for the cleaning of surfaces material characteristics
Other characteristics of particles such as electrostatic charge, ionic charges, biological state, and others
The document covers the classification system of surface particle contamination with no reference to the interactive bonding forces or generation processes, which are usually time-dependent (such as deposition, sedimentation, aging) and process-dependent (such as transportation or handling). Measurement methods of the classification should be adapted for surface characteristics (such as porosity, roughness, electrostatic charge, surface energy, etc.). The surface cleanliness depends amongst others on material and design characteristics, on stress loads (complex of loads acting on a surface) and on the prevailing environmental conditions.
