ISO 14644-13

ISO/FDIS 14644-13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of
particle and chemical classifications


ISO/FDIS 14644-13: Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications is available as an Final Draft International Standard.

‘Surface’ refers to the interface between two phases. For the purpose of this document, the surface is a solid. “Clean surface” is where one or more of the contamination categories (particles, chemical) are under control due to cleaning / decontamination. The degree of cleanliness is specified in the corresponding surface cleanliness classifications (ISO 14644-9:2012 Surface cleanliness by particle concentration SCP; ISO 14644-10:2013 Surface cleanliness by chemical concentration SCC). Different cleaning methods are necessary depending on the degree of cleanliness (cleanliness class) required. This standard gives guidance on the selection of cleaning methods to achieve specified cleanliness levels. For the selection procedure, the aspects of surface description, cleanliness specifications, types of contamination, cleaning techniques, material compatibility, and assessment methodology are taken into consideration. Most of the methods are suitable for removal of more than one contamination category at the same time therefore a common standard for the selection of a cleaning method for both particles as well as chemical contamination is needed.

Scope:

The standard addresses the cleaning to a specified degree on cleanroom surfaces, surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP) and surface cleanliness by chemical concentration (SCC) classes and which techniques should be considered to achieve these specified levels.

The efficacy of cleaning techniques will make reference to the cleanliness classes and associated test methods found in ISO 14644-9:2012 and ISO 14644-10:2013.

View list of ISO 14644 Standards

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